damascene

The Study of FSG Etching in Non-Stop Layer Dual Damascene Structure

无中间层双大马士革中FSG刻蚀技术研究

In yet another embodiment , metal layer ( 16 ) is a damascene copper layer .

然而，在另一个实施例中，金属层（16）是镶嵌铜层。

This would approach the opinion of the Damascene concerning the holiness of the active conception .

这将接近舆论对大马士革关于成圣的积极构想。

Cu electrodeposition is one of the most important technologies in the damascene fabrication of interconnects .

铜电沉积是互连“大马士革”（damascene）工艺中最为重要的技术之一。

This truly is a Damascene conversion .

这确实是一次质的转变。

In this paper , the Damascene Cu interconnecting integration technology , low-k dielectric materials and barrier materials in Cu interconnecting integration technology are introduced .

论述了铜互连技术中低k介质材料、势垒层材料以及铜互连布线的大马士革工艺。

The results indicate the stress of copper interconnects generates in the metallization and the thermal stress caused by thermal mismatch during the Damascene process is the main stress .

对测量结果的分析得出金属薄膜的淀积是造成铜互连线中应力的主要原因，热应力在铜互连线应力中占较大比例，热处理后铜互连线中应力减小。

In this paper , we propose the investigation of the void in dual damascene process and the hole and trench with large aspect ratios between width and height .

本论文主要针对双层镶嵌制程所造成的孔隙及具有高深宽比的极窄和极深的通孔和沟槽所造成的影响加以探讨及研究。

The traditional Al metallization could not meet the requirements for the development of interconnect technology . Developing damascene Cu metallization has become the main trend recently for the interconnect technology .

传统的Al金属互连技术已经不能满足现代互连技术发展的需要，大马士革结构的Cu金属互连技术已成为互连技术的重点发展方向之一。

Thermal stability of a-C : F : H film better than 400 , which is designed in damascene process , should be required except for its low dielectric constant ( s < 3 ) .

a-C：F：H薄膜除了有较低的介电常数（占＜3）外，其热稳定温度还需要达到平面工艺的温度要求（400℃）。为此，我们进行了氮气气氛中a-C：F：H薄膜热退火的研究。

Soon after this Damascene moment - one of the most celebrated conversions in 20th-century Chinese culture - Zhou began his career as the self-appointed literary doctor of China 's spiritual ills .

这个时刻是20世纪中国文学史上最著名的转变之一，不久后，周树人就自诩为文学医生，专门疗救中国人灵魂的沉疴。

Although he is best known for that , he is proud of having the world 's largest collection of Japanese Meiji art and of his collections of Spanish Damascene and antique Swedish textiles .

尽管他因此闻名天下，但让他引以为豪的，却是他那数量位居全球之冠的日本明治时期艺术品收藏，以及他的西班牙金属嵌制艺术品和瑞典古代纺织品收藏。

The perfumer - Jean Patou - created a scandal in the oppressed days of the Depression back in 1929 by combining an extradionary large amount of expensive ingredients including Jasmine from Grasse and Damascene Rose from Bulgaria .

在经济大萧条的1929年，设计师让.巴杜却将极其昂贵的珍贵香料调和成了这瓶传世经典，那些极其讲究的香料里包括了格拉斯的茉莉花以及保加利亚玫瑰。