stepper

The overlay accuracy is one of the most important specifications of the stepper .

套刻精度是步进式光刻机最重要的指标之一。

Finally , the stepper motor control system application examples .

最后给出了步进电机控制系统的应用实例。

Numerical Intelligent - based Stepper Motor Driving System Used in NC

经济型智能化数控步进电机驱动系统

Designing of High Precision Angle Position Tracking System for Stepper Motor

高精度步进电机角度位置跟踪系统设计

Measurement and Analysis of Critical Parameters for 0.5 μ m Stepper

0.5μm分步光刻机关键参数测量与分析

Design of PTZ Control System Based on Stepper Motor Subdivision Control

基于步进电机细分控制的云台控制系统设计

Realization of Point Control Based on Stepper Motor Controlled by PLC

采用PLC控制步进电机实现点位控制

Computer Software used in Control and Management of Wafer Stepper

分步重复投影光刻机整机控制管理软件

Then the stepper motor control program was developed using motion logic .

最后，通过MotionLogic软件编程，开发了步进电机速度控制程序。

Research on a New Structure of Precision Piezoelectric Linear Stepper Actuator

新型压电步进直线精密驱动器结构的研究

The Design of Stepper Motor Control - drive Card Based on CAN Bus

基于CAN总线步进电机控制驱动卡的设计

The Unified State Equations of the Hybrid Stepper Motor Drive System

混合式步进电机驱动系统的统一状态方程

Application and Research on Alignment System for Stepper

分步投影光刻机对准系统应用与研究

Pneumatic Stepper & A New Type Pneumatic Automatic Control Element

气动节拍器&新型自动控制气动元件

The Stepper Sintering Machine 's Automatic Cycle Control System

步进式烧结机自动循环运行控制系统

Research of Stepper Motor Controlling System in Numerical Control Reformation of General Lathe

普通车床数控改造中步进电机控制系统的研究

Design of PWM Constant Current Division Drive Circuit of Stepper Motor

PWM细分恒流步进电机驱动电路的设计

Analysis of Using Power Amplifier to Drive Stepper Motor

基于功率放大器的步进电机驱动控制

Investigation of dynamic characteristics of stepper motors under real-time smooth tracking control

实时连续跟踪控制下的步进电机的动特性研究

The design of impulse signal controller in stepper motor based on FPGA

基于FPGA实现步进电机脉冲信号控制器设计

A Stepper Motor Precision Position Controlling Based on DDS Technology

基于DDS技术实现步进电动机精确定位

The Development of a Kind of Hybrid Stepper Motor Driver

一种小功率混合式步进电机驱动器的开发

Multi-channel stepper motor control system can shorten the work time , improve work efficiency .

多通道步进电机控制系统的设计可以缩短工作时间，提高工作效率，对于实际生产是非常有意义的。

The Research about the Method of Analysing the Soft Diagnosis of the Stepper Motor System

步进电动机系统软性故障分析法探讨

The Design of Soft Start and Stop Control for Stepper Motor Based on PLC

基于PLC的步进电动机软起、停控制设计

In this paper , an overlay error model of stepper is introduced .

本文讨论了套刻误差的组成及误差模型的建立，并介绍了套刻误差的表示方法。

Interface Design of Computer Real Time Control System for 0.8 ~ 1 μ m Wafer Stepper

0.8～1μm分步重复投影光刻机计算机实时控制系统接口设计

High Accuracy Control of Stepper motor Based on Labwindows / CVI

基于Labwindows/CVI的步进电机高精度控制

The thesis analyses the work principle and operating characteristics of hybrid stepper motor .

论文分析了混合式步进电动机的工作原理和运行特性。

A Correct Deviation Control System Driven by Stepper Motor

一种采用步进电机的纠偏控制系统