Boron-doped zinc oxide ( ZBO ) target material was developed by sintering of ZnO and B_2O_3 powders at a temperature ranging from 1200 ℃~ 1350 ℃ .
用常压烧结方法，在1200℃~1350℃烧结不同含B量的掺硼氧化锌（ZBO）靶材。
zbo