双频激光干涉仪

双频激光干涉仪是应用广泛的精密测量仪器。

Dual-frequency laser interferometer is a widely used precision measurement instrument .

高测速双频激光干涉仪及其性能检测

Dual-frequency Laser Interferometer with High Measurement Speed and Its Performance Testing

用MJS双频激光干涉仪指导数控机床位置度误差的修正

Correcting Position Errors of NC Machine Guided by MJS Two-frequency Laser Interferometer

同时，用双频激光干涉仪测量CCD摄像机的移动距离，得到标定所需要的多个特征点在物面中的位置及在对应图像中的坐标位置。

Meanwhile , the exact displacement of the CCD camera can be measured by a double-frequency laser interferometer , the needed coordinates of the feature points in the object plane and in the correlative image plane are gained .

5528A双频激光干涉仪在定位精度检测中的评定软件和扩展

The Judged Software and Its Expansion in Measuring of Position Finding Precision with 5528A Double-frequency Laser Interferometer

为了区别于目前国内外双频激光干涉仪光源的3MHz以下的小频差和双折射双频激光器产生的40MHz以上的大频差，我们称之为中频差。

And the frequency difference of the birefringence dual-frequency laser is above 40 MHz , called big frequency difference . Recently we have successfully invented He-Ne laser with controllable frequency difference ranging from 3 to 40 MHz called mid-frequency difference to distinguish from those two mentioned above .

双频激光干涉仪在测距仪精度自动检测中的应用

The Application of Laser Interferometer in Automatic Accuracy Testing of EDM

双频激光干涉仪在机床检定中的应用

Application of Double Frequency Laser Interferometer in Machine Tool Testing

高测速双频激光干涉仪的若干关键问题研究

Study on Some Key Problems in High Speed Dual Frequency Laser Interferometer

双频激光干涉仪技术现状与发展

Dual - frequency Laser Interferometer Present State and Development

分析了光栅退偏效应的影响，与差动双频激光干涉仪进行了比对。

The error caused by the depolarization effect of the grating is analyzed .

高测速双频激光干涉仪

High measurement speed dual frequency laser interferometer

双频激光干涉仪测试直线电机进给定位精度的研究

Research on Measuring the Position Errors of Linear Motor Drive by Twice Frequency Laser Interference

用双频激光干涉仪实时修正阿贝误差的方法和实验

Use Double Frequency Laser Interferometer to Make Real Time Correction of Abbe Error and Its Test

现代制造业对双频激光干涉仪的最大可测量速度提出了越来越高的要求。

There is an increasing demand on the measurable velocity of laser interferometer in manufacturing technologies .

采用室内双频激光干涉仪为计量标准，建立了一条高精度室内基线。

A high-precision base line indoor was build using double frequency laser interferometer as the measurement standards .

应用双频激光干涉仪和激光跟踪仪与该系统进行了测量数据比对。

Measurement data of this system have been compared with those of double-frequency laser interferometer and laser trackers .

介绍了电子束曝光机激光定位精密工件台的工作原理，其测量系统首次采用国际先进的HP5527双频激光干涉仪。

The HP 5527 laser measurement system is used for the stage and the working principle is introduced .

双频激光干涉仪高精度测量大型工件内外径系统的研制

Development of A High Precision Measurement System for A Large Scale Workpiece Diamter By Using A Dual Frequency Laser Interferometer

测头不仅可以安装在三坐标测量机上，也可以结合其它的测长仪如双频激光干涉仪进行表面形状测量。

It can be mounted on the Three-coordinate measurement machine or other length measurement machine like Interferometer to take measurement .

通过实验对实际测量系统进行了分析与标定，并将测量结果与双频激光干涉仪进行了比较。

The actual measuring system is analyzed and calibrated through experiments and the measurement results are compared with laser interferometer system .

分析了系统精度，用双频激光干涉仪测量系统组成部分的误差，并通过软件方法进行补偿。

The system accuracy is analyzed , and the systematic error is measured by 5528A Laser Measurment System and calibrated by software .

该装置以拍波合成的场强信号的节点为对准标志，以光路组合形成的双频激光干涉仪测量尾数部分。

The node is used as sampling flag and the beat-wave fringe fraction is measured with double frequency interferometer combined by optical components .

利用双频激光干涉仪对系统进行精度调试，并在软件中进行精度补偿。

The method of using dual-frequency laser interferometer is used to do accuracy debugging on system , and make a precision compensation for software .

受光源频差低的限制，目前双频激光干涉仪最高测量速度不超过1m/s，而以这种激光器作光源的干涉仪允许的最高测速可达到4m/s或者更高。

Because of the little frequency difference of light resource , the top measurement speed of present interferometers is not more than 1 m / s.

详细探讨了将双频激光干涉仪应用于高速直线运动单元定位精度测试的实验技术。

The experiment , which is designed to measure the positioning accuracy of high-speed linear motion unit by means of laser interferometer , is described ;

使用双频激光干涉仪测长时，必须对测量环境的气象条件进行修正，才能得到准确的测量结果。

When a double frequency laser interferometer is used for length measurement , the meteorological conditions of the testing environment must be revised in order to get the accurate testing results .

用双频激光干涉仪对测量系统的测量稳定性以及测量精度分别进行了比对实验。

We also make contrastive experiments for the measuring stability , resolution and uncertainty using the dual-frequency laser interferometer . And lastly , we analyze and research the measuring errors of the system .

对后置处理与几何补偿相结合的补偿技术进行研究，开发相应的误差补偿软件，借助双频激光干涉仪进行测量检测、补偿的试验验证与应用研究。

Study of post-processing and geometric compensation combined compensation technique for using dual-frequency laser interferometer to achieve line of machine tool error detection and compensation for applied research , experimental verification by examples .

该测头不仅可以安装在三坐标测量机上，也可以结合其它的测长仪如双频激光干涉仪进行测量，具有广泛的推广前景和很强的现实意义。

It can not only set on the Three-dimensional Coordinate Measurement Machine but also combine with other machine such as Interferometer to take measurement , so it has broad foreground and high application value .