溅射离子泵

全自动溅射离子泵电源及其性能检测

A full automatic SIP power supply and performance test

一种中磁场层状阳极溅射离子泵

A sputter-ion pump with parallel-plate anode for use in the middle magnetic field

微型溅射离子泵在X射线管制造中的应用

Mini Sputter Ion Pump and Its Application in the X-Ray Tube Manufacture

10~（-10）Pa溅射离子泵和非蒸散型吸气剂的复合泵

Integration of Commercial Sputtering Ion Pumps with Non - Evaporative Getter

10~（-10）Pa溅射离子泵的研制

Research on Sputter Ion Pump with 10 ~ ( - 10 ) Pa Ultimate Vacuum

介绍微型溅射离子泵的结构、工作原理及其在X射线管制造中的应用。

This article described the design , principle of the mini ion pump and its application in the pumping process of X ray tube manufacture .

3L2-220型溅射离子泵研制

Development on Sputter Ion Pump , Type 3L 2 220

用溅射离子泵获得超高真空，监测室本底真空度为6×10~（－7）Pa。

The apparatus is pumped by an ion sputtering pump . A base pressure of 6 × 10 ~ ( - 7 ) Pa was obtained in the analysis section .

扩大高抽速范围的3L-220型溅射离子泵的研制

Development on Enlarging the Pumping Speed Range of Sputtering Ion Pump 3L-220

溅射离子泵排氩性能的研究

Study on the argon pumping ability of sputtering ion pump

溅射离子泵控制电源的自动保护功能

Auto-protection Function of Sputter Ion Pump 's Control Power Supply

介绍了一种全自动溅射离子泵电源。

Introduces the power supply for a full automatic sputtering ion pump .

静电马鞍场溅射离子泵在注入电子时的效果

Effect of Sputtering Ion Pump of Electrostatic Saddle Field in the Electron Injection

溅射离子泵的抽速计算

Calculation of Pumping Speed of Sputtering Ion Pump

微型溅射离子泵性能测试

Experimental Evaluation of Miniature Sputtering Ion Pump

溅射离子泵在高电压和高磁场的作用下产生潘宁放电，吸附容器内气体分子达到真空的目的。

Based on the ion source discharging experiment in NT50 neutron generator , effect of magnetic field variation in Penning ion source on discharge current is studied .

分析比较了溅射离子泵、冷阴极电离超高真空计、热阴极电离超高真空计等作为真空保护传感器的不同电子学设计。

The electronic circuitry of the various vacuum protection schemes , which use sputtering ion pump or cold-cathode or hot cathode ionization gauge as sensors , was compared .

本文主要介绍10-10Pa溅射离子泵的研制，以及如何提高极限真空和抽气速率的方法。

This article mainly introduced the research on sputter ion pump with an ultimate vacuum of 10-10 Pa. The methods for improving ultimate vacuum and pumping speed were also discussed .

针对溅射离子泵高压电源应具有的负阻特性，本文详细介绍了负阻性DC/DC开关电源控制电路的组成和工作原理。

In view of the negative resistance characteristics of the high-voltage power supply for SIP ( sputter ion pump ), a special switched DC / DC power supply was introduced .

本文介绍了小抽速微型溅射离子泵的性能测试系统和参考机械行业标准确定的测试方法，探讨了测量结果误差来源。

The testing technique and system of the newly developed , miniaturized sputtering ion pump with low pumping speed has been developed in accordance with the standards formulated by machine industry .

对涡轮分子泵无油超高真空系统及溅射离子泵无油超高真空系统的结构及操作方法作了介绍，并对它们相关的特性进行了讨论。

Abstract : The structures and operating methods of turbo molecular pump with non-oil ultra high vacuum system and sputter ion pump with non-oil ultra high vacuum system are introduced , and their relevant characters are discussed .