热电堆

CMOS兼容的微机械P/N多晶硅热电堆红外探测器

CMOS Compatible MEMS P / N Polycrystalline Silicon Thermopile IR Detector

基于MEMS热电堆传感器的高温测量技术

The High Temperature Measurement Technology Based on MEMS Thermopile Sensor

采用MEMS工艺制作的微机械红外热电堆由于能够有效降低其热传导、提高其集成度，性能比传统热电堆器件有较大幅度提升。

MEMS IR thermopiles perform much better than conventional IR thermopiles since that MEMS technology could decrease heat conduction and improve the integration of the devices .

在本文中，我们充分考虑了与CMOS工艺的兼容性，通过设计一种正面开口的热电堆结构，制作了微机械热电堆红外探测器。

In this thesis , we give full consideration to the compatibility with CMOS technology and fabricate MEMS thermopile IR detector through designing a front-cut thermopile structure .

由于微机械红外热电堆大都采用背腐蚀法或较复杂的表面加工法制备，与CMOS工艺兼容性差且需要后续工艺，对工艺要求高成品率低。

Most of MEMS IR thermopiles are fabricated by back-etching or complicated front-etching technologies , which are not so compatible with CMOS technology , which need post processes and is strict with process and lead to low product rates .

模拟结果包括共面波导（CPW）与终端电阻上的温度分布，以及热电堆的接近对CPW性能的影响。

The temperature distribution on the coplanar waveguide ( CPW ) and the terminal resistors was simulated , and so did the impact of approach of the thermopile on the CPW .

确定了热偶对数为50，热电堆与CPW之间的距离为50μm，并选择了GaAs和Au作为热电偶的两臂，TaN作终端电阻。

In the end , the design is specified , the number of the thermocouple is 50 , and the distance between the CPW and the thermopile is 50 μ m. GaAs and Au are chosen as hands of the thermopile , and TaN as the terminal resistor .

本文建立了低温半导体热电堆的一维非稳态导热方程，并采用Binder-Schmidt显式方法，对低温热电堆内部温度分布进行了数值计算。

This paper establishes one-dimensional unsteady heat conduction equation of semiconductor thermoelectric modules and numerically calculates temperature distribution using Binder-Schmidt explicit method that can coincide well with experimental results .

硅铝结构的薄膜热电堆采用半导体集成电路工艺和微机械加工工艺制造。

The thermopile fabrication process combined MEMS technology with semiconductor IC processes .

热电堆型热流计制作及测试误差分析

Self-made Thermopile Heat Flow Meter and Testing of Error Analysis

半导体热电堆电臂尺寸之研究

A research on ARM dimension for a semiconductor thermoelectric pile

原子层热电堆材料的激光感生热电电压

Laser Induced Thermoelectric Voltage of Atomic Layer Thermopile Materials

覆盖热反射层的红外热电堆改进设计

Design of infrared thermopiles with heat reflective emitter coatings

红外热电堆滚筒温度测量仪的设计

Designing of Infrared Thermopile Roller Temperature - measuring Apparatus

采用薄膜热电堆的激光能量计

The Laser Calorimeter with a thin Film Thermopile

一种新型贴壁式热电堆温度传感器

A New Type Of Face-stuck Thermopile Sensor

热电堆式光电传感器暂态模型

The Transient Mode of Thermopile Type Photoelectric

半导体热电堆串、并联发电性能及热电堆复现性研究

Research on the generating performance of series-parallel connection and reappearance of a semiconductor thermoelectric module

一种新型环状热电堆传感器

New Kind of Annular Thermopile Sensor

半导体材料优值系数对热电堆发电循环效率的影响

Influences of the figure of merit on the efficiency of a semiconductor thermoelectric module generator cycle

基于热电堆结构的微型热传导真空传感器

Thermopile-Structured Micro Thermal Conductivity Vacuum Sensor

冷、热端温度对半导体热电堆发电性能影响的初步研究

A primary research on generation performance of the semiconductor thermoelectric module under variable cold-side and hot-side temperature

热电堆红外探测器是最早研究并实用化的热电型红外成像器件之一。

Thermopile IR detector is one of the first thermal IR imaging device that has been studied and applied .

介绍一种封闭薄膜式红外热电堆上增涂金属反射层的新型设计。

A new design of infrared thermopiles based on closed membrane with an additional metal - reflective layer is demonstrated .

研究成果是基于热电堆的原理用新型的平面布线取代三维的线圈布线。

According to the principle of thermopile , and the three-dimensional loop wire laying is substituted by new-style plane wire laying .

利用红外测温技术，以热电堆传感器为测温元件，研制针对高压开关柜的温度实时监测网络。

Using IR temperature measurement technology , a temperature real-time monitoring network for high voltage switch cabinet based on thermopile sensor is developed .

发现半导体热电堆作为电源时，其内阻对它的性能指标有很大的影响，而且内阻随着温度的升高而增大。

While semiconductor thermoelectric module is used as power supply , inner resistance which is changed with temperature has great influence on its performance .

论文第四章以一种便携式红外体温筛检仪的研制为背景，设计了一套对热电堆红外传感器的温度补偿方案。

In addition , to develop a portable infrared device for human temperature screening , a set of temperature compensation method on thermopiles was designed .

该装置以补偿型真空热电堆为参考基准，采用双光路替代法，全部测量过程自动化。

The bi-path substitution method is used and the vacuum thermopile of compensation type is chosen as a reference standard . All the measuring process is automatical .

针对汽车尾气新的排放标准和检定方法的实施，设计了用于汽车尾气监测的热电堆传感器系统。

A new kind of thermopile sensor system for vehicle exhaust gas monitoring was designed , aiming at new emission standards and measurement methods of vehicle exhaust gas .