f400
f400
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The design and calculation of a vertical type turbomolecular pump were described in this paper , especially a detailed discussion was made on the mechanical properties of this pump . This method of design has been successfully applied in the development of F400 / 3500 turbo-molecular pump .
本文较系统地阐述了立式涡轮分子泵的设计计算方法,尤其对分子泵涡轮的力学性能做了较深入的讨论,该套设计计算方法在研制F400/3500分子泵的过程中,已得到成功运用。