微型加速度计

微型加速度计作为一种新型惯性传感器，它在体积、重量、成本、功耗、可靠性和寿命方面都具有传统加速度计无可比拟的优势。

As a new style of the inertial sensor , the micro accelerometer has many advantages over the traditional accelerometer in its bulk , weight , cost , power consumption , reliability and length of life .

一种硅微型加速度计的制备与测试方法研究

A Study of Preparation Technologies and Testing Methods of a Micro-silicon Accelerometer

硅微型加速度计有限元模型与动态分析研究

Finite_Element Models and Dynamic Analysis of Micro Silicon Accelerometer

高过载条件下微型加速度计的动态分析

Dynamic Analysis of Micro-machined Accelerometer under High Overload

文中介绍了扭摆式硅微型加速度计的机械结构、工作原理。

The pendulous Si micromechanical accelerator 's mechanical structure and the principle of operation are presented .

静电力平衡式微型硅加速度计方案分析

Analysis on the Schemes of Electrostatically Force-Balanced Micro Silicon Accelerometer

硅微型惯性加速度计中敏感头的研究

Study on Sense Organ of Silicon Miniature Inertial Meter

微型光纤加速度计系统研究

Study of Micro Fiber Optic Accelerometer System

提出了一种基于北京大学硅玻璃键合深刻蚀释放工艺的扩展工艺，用来加工微型隧道加速度计。

A tunneling accelerometer is fabricated and characterized based on the extension of the silicon-glass anodic-bonding and deep etching releasing process provided by Peking University .