微机电系统

微机电系统动态特性的光学检测方法

Optical Measuring Methods for Dynamic MEMS Characterization

自从20世纪80年代以来，微机电系统（MEMS）技术是一个迅速发展的新兴的科学技术领域。

MEMS technology is a newly fast developing area in the last 20 years .

当前微机电系统（MEMS）是微纳科学技术中的研究热点。

Recently MEMS is a hotspot of Micro-Nano Science and Technology .

微机电系统（MEMS）产品及其促进市场化途径的研究

Research of the MEMS Product and Its Industrialization Ways

研制了一种基于MEMS（微机电系统）技术的固体化学微推进器。

MEMS-based solid propellant propulsion was developed .

介绍了脉冲激光微加工技术及其在微机电系统（MEMS）加工中的应用。

The paper introduces pulsed laser micromachining and its application in microelectromechanical systems ( MEMS ) .

利用微机电系统（MEMS）加工技术，制备Si基膜片型微结构单元，并分析其热学性能。

The thermal properties of Si based module of membrane type MGS manufactured by MEMS technology are reported .

射频微机电系统（简称RFMEMS）通过机械移动或振动实现了射频电子器件的功能。

RF MEMS ( Radio-Frequency Micro-Electro-Mechanical System ) component achieves RF performance by mechanical movement or vibration .

微机电系统（MEMS）技术及发展趋势

MEMS Technology and Developing Trend

微机电系统（MEMS）的发展，带动了微细加工技术的发展。

With the development of the Micro Electro Mechanical System ( MEMS ), mico-machining technologies grows rapidly .

以硅材料为基础的微机电系统MEMS被人们认为是21世纪革命性的新技术，是实现信息采集、处理、执行一体化，使之成为真正的系统。

The new technology MEMS based on silicon integrate the collection , process and executing of the information .

微机电系统（MEMS）是涉及微电子学、微机械学、微流体学等多个学科领域内容的复杂系统，具有多学科、多物理域交叉耦合的特点，为其产品的设计带来了较大的难度。

MEMS is a complex system which refers to several disciplines such as micro-electronics , micro-mechanics and micro-fluidics .

微机电系统（Microelectromechanicalsystem）代表了一项与集成电路制造工艺相同的新兴技术，在射频与微波领域得到广泛应用。

Microelectromechanical system ( MEMS ) represents an exciting new technology derived from the same fabricating processes used to make integrated circuits .

分析了应用于生物工程目的微机电系统&微流控制系统在DNA计算机研究中的相关进展。

This article introduces the theory , traits and developments of DNA computer , puts forward the importance of micro-flow system in the developments of DNA computer .

微机电系统（MEMS）的广泛应用推动了微型动力源的研究发展。

The widely use of MEMS prompted the research of Power MEMS . MEMS Micro Power System the power ;

微系统工程包括微机电系统（MEMS）及相关设备的设计、制造和封装。

Micro Systems Engineering includes Micro Electro-Mechanical Systems ( MEMS ) and related equipment design , manufacture and package .

测试技术在微机电系统（MEMS）研发过程与产业化过程中具有重要的现实意义。

Measuring and testing technique has actual significance in the course of research , development and industrialization of MEMS .

介绍了微机电系统（MEMS）技术的概念和特点，并简要地叙述了微机电系统的材料和主要加工工艺。

The conception , characteristics , materials , process of Micro Electro-Mechanical System ( MEMS ) are briefly introduced .

阐明了微机电系统（MEMS）的学科内涵与应用范畴。

The connotation and applying area of Micro Electro Mechanical Systems ( MEMS ) are clarified in this paper .

近年来，基于MEMS（微机电系统）技术的微惯性传感器的研究与发展受到了广泛的重视。

In recent years , the research and development of micro-inertial sensors based on MEMS technology has received wide attention .

微机电系统（MEMS）将对引信的发展提供其它技术不可比拟的技术支撑。

Micro Electromechanical Systems ( MEMS ) will provide new technical support , which the other technology can not provide .

而于二十世纪九十年代起发展起来的微机电系统（MEMS）技术，为空中通信节点设备的轻型化提供了新的方向。

MEMS technology which has been developed during 1990s provides a new direction for the lightening of air communication equipments .

微机电系统（MEMS）与引信技术相结合，为引信技术的发展带来了革命性的变化。

The combination of Microelectromechanical System ( MEMS ) and modern fuse technology bring on a revolution in fuse technology .

提出了一种用于测量微机电系统（MEMS）器件瞬时速度、位移的测量系统。

A system used for testing transient velocities and displacements of the micro-electronic-mechanical system ( MEMS ) devices is presented .

微机电系统（Micro-Electro-MechanicalSystems，MEMS）的发展和应用能够为引信智能化、小型化创造条件，将新型的智能引信运用到现代化战争中去。

The application of MEMS ( Micro-Electro-Mechanical Systems ) could create conditions for intelligentized and miniaturized fuze in the current war .

硅是MEMS器件的主要材料，其疲劳特性将直接影响微机电系统的可靠性。

Silicon is the most common structural material of MEMS , whose fatigue properties will directly affect the reliability of MEMS .

因此，目前在MEMS微机电系统中，溶胶-凝胶法制备PZT铁电薄膜是广泛应用的方法。

Therefore , Sol-Gel method has been widely applied to producing PZT ferroelectric film in modern MEMS so far .

基于可重用IP（Intellectualproperty）的设计方法为微机电系统（MEMS）系统级建模与仿真技术提供了新的思路，有望成为未来的主流。

Reusable Intellectual Property ( IP ) based method is promising to be the main trend for microelectromechanical systems ( MEMS ) modeling and simulation at system level .

本文提出了一种基于MEMS（Micro-electroMechanicalSystem，微机电系统）工艺技术的新型结构的角度调谐光滤波器。

In the thesis , a novel structure of tunable optical filters based on MEMS ( Micro-electro Mechanical System ) technologies has been put out .

利用MEMS（微机电系统）标准光刻、湿法腐蚀以及低温键合技术制作了微流控分析芯片。

The microfluidic chips were fabricated with standard photolithography , wet etching and low-temperature bonding techniques of MEMS ( Micro-electro-mechanical system ) .