磁控溅射

结果表明，在沉积真空2Pa下，蒸发、磁控溅射沉积的铀薄膜已完全氧化；

The results indicate that uranium films prepared by vapour and sputter deposited ( 2Pa ) were fully oxidized .

单极性电压源高频链逆变电源的研制单片机及自组织模糊控制在可控硅磁控溅射靶极电源中的应用

Design of Uni-Polarity Voltage Mode Inverters with High Frequency Link Application of Self organizing Fuzzy Control Based on the Single Chip Microcomputer on the SCR Magnetic Sputter Cathodic Power Source

射频磁控溅射GaP薄膜的光学性能

Optical Properties of Gap Film Prepared by RF Magnetron Sputtering

磁控溅射Si/Co多层膜的小角X射线衍射测试研究

Small-angle X-Ray Diffraction Study on Si / Co Multilayer Thin Films

射频磁控溅射钛镀层与陶瓷界面的X射线光电子能谱研究

XPS Study on the interfacial structure of RF magnetron sputtered titanium coatings and ceramics

用RF平面磁控溅射高度c轴取向ZnO压电薄膜

Preparation of Highly c-Axis Oriented ZnO Piezoelectric Films by RF Planar Magnetron Sputtering

RF磁控溅射法原位制备C轴择优取向ZnO薄膜

In Situ Deposition of C-axis Oriented ZnO Thin Films by RF Magnetron Sputtering

磁控溅射制备参数对ZnO∶Al光学性能的影响

The Effect of Magnetron Sputtering Growth Parameters on Optical Properties of ZAO

高密度等离子体增强非平衡磁控溅射沉积Cu膜研究

Study of Cu film deposited by high density plasma enhanced nonequilibrium magnetron sputtering

Ni基体磁控溅射离子镀Al膜的电镜观察

TEM observation of ion-plated Al film on Ni Substrate

磁控溅射工艺对纳米Ti膜形貌的影响

Effect of Magnetron Sputtering Process on Forming of Ti Thin Film

提高DC平面磁控溅射中靶材利用率的新方法

A New Method to Increase the Utilization Factor of Target by DC Planar Magnetron Sputtering

磁控溅射和热氧化法制备ZnO纳米颗粒

Synthesis of ZnO Nanoparticles by Magnetron Sputtering and Subsequent Thermal Oxidization

RF磁控溅射制备Al2O3薄膜及其介电性能研究

Dielectric Properties of Alumina Films Prepared by RF Magnetron Sputtering

磁控溅射Ti合金薄膜结构特征及贮氢性能

The structure and hydrogen storage characteristic of magnetron sputtering Ti-base alloy films

中频对靶磁控溅射合成TiN／Ti多层膜

Tin / ti multilayer films synthesized by mid-frequency dual-magnetron sputtering

磁控溅射TiN界面结合强度的压痕法测试

Measurement of Bonding Strength of Magnetic Sputtered TiN Coatings by Indentation Method

中频反应磁控溅射Al2O3薄膜的光学性质

Optical Properties of Al_2O_3 Thin Film Prepared Through Medium-Frequency Reactive Magnetron Sputtering Process

磁控溅射沉积U薄膜性能研究

Study on Properties of U Films Prepared by Magnetron Sputtering

射频磁控溅射沉积的ZnO薄膜的光致发光中心与漂移

Photoluminescence centers and shift of ZnO films deposited by rf magnetron sputtering

双靶磁控溅射制备掺W氧化钒薄膜的研究

Study on W-doped vanadium oxide thin films prepared by double targets magnetron sputtering

石英衬底上磁控溅射SiC膜退火形成SiC纳米线

Formation of SiC nanowires on SiO_2 substrate by magnetron sputtering and annealing

工艺参数对磁控溅射TaOx薄膜离子导体性能的影响

Study on the Ion Conduct Properties of TaO_X Film by Magnetron Sputtering Method

射频磁控溅射（Ti，Al）N薄膜性能的研究

Mechanical Properties of ( Ti , Al ) N Films Grown by RF Magnetron Co - Sputtering

采用射频磁控溅射复合靶技术制备了SiSiO2薄膜，并在各种温度下进行了退火处理。

The Si-SiO_2 films are prepared by RF co-sputtering technique .

磁控溅射制备Co/Al2O3/FeNi磁隧道结

Co / Al_2O_3 / FeNi Magnetic Tunneling Junction Prepared by Magnetron Sputtering

离子源辅助磁控溅射沉积SiOx阻隔薄膜的研究

Study on SiO_x Coating Deposition by Magnetron Sputtering with Ion Beam Assisted

衬底温度对中频磁控溅射ZnO∶Al透明导电薄膜性能的影响

Substrate Temperature Dependence of the Properties of ZnO ∶ Al Thin Films Prepared by Mid-frequency Sputtering

采用磁控溅射的方法来制备ZnO纳米薄膜。

ZnO nano films were prepared using RF magnetic sputtering technology in different conditions .

介绍了基于FPGA的太阳能真空集热管磁控溅射镀膜机控制系统的整体设计和工程实现过程。

This paper introduces an integrated design and implementation of the SCS control system based on FPGA .