重复定位精度

实验结果表明，该驱动器驱动行程为10μm的压电陶瓷时，满行程带宽大于1.5kHz，重复定位精度小于4nm（0.40/0）。

When it drives the piezoelectric actuator with 10 μ m travel , experimental results show that the bandwidth of the whole travel is more than 1.5 kHz and the repeatability smaller than 4 nm ( 0.40 / 0 ) .

断层切削设备的最小进给量为0.001mm，重复定位精度为0.01／300mm。

Minimum feed of milling machine was 0 . 001 mm ; repeatability of positioning was 0 . 01 / 300 mm .

实验证明：本系统的重复定位精度为2.5μm，试磨样件的轮廓精度在0.01mm以内。

The profile accuracy of the samples ground by this device is within 0.01 mm .

本文阐述了其设计原理并就主要精度&光栅数显重复定位精度和CCD光电瞄准精度进行了分析。

Prating and digital show as well as computer . This paper deals with its design principle and precision analysis .

最后利用CCD激光位移传感器对点胶机运动平台的重复定位精度进行了测试，证实控制系统能满足高速点胶的定位精度及功能要求。

Last but not least , Repetitive positioning accuracy of platform was measured by CCD laser displacement sensor . Results show that the control system satisfies positioning accuracy and function needs of high-speed fluid dispensing .

机器人PTP控制曲线对机器人的性能如运行平稳住、重复定位精度、寿命等有很大影响。

The PTP control curve of robot produces measure effect on the property of robot such as the movement stability , repeat accuracy ability , life and so on .

实验研究表明：系统的动态和稳态性能良好，该定位机构的最大工作行程100mm，稳定时间小于40ms，重复定位精度10nm。

The experimental results show that the travel range is 100 mm , the settling time is less than 40 ms and the repeatability error is 10 nm .

本系统在X、Y1、Y2三个方向达到了±0.1μm（3σ）的重复定位精度、±50nm的调焦分辨力和5μm／全片的调平精度。

The system has realized ± 0.1 μ m ( 3 σ) repeat positioning accuracy in three directions of X , Y 1 and Y 2 ,± 50nm focusing resolution and 5 μ m leveling accuracy for the whole wafer .

提高机床重复定位精度的新机构

A New Mechanism of Heightens the Machine Tools Repeatability Positioning Accuracy

高速往复运动机构重复定位精度测量技术研究

Study on Measuring Technique of Repetitive Setting Accuracy for High-speed Reciprocating Apparatus

进口滚珠丝杆及直线导轨确保了机床的重复定位精度。

Import ball screw and linear guide ensure the repositioning precision machine tools .

最后通过实验给出并联机器人的运动分辨率和重复定位精度。

Finally , through the test subdividing accuracy and repeated allocation precision are shown .

机器人重复定位精度分析

Repeatability Accuracy Analysis of Robot Manipulator

变轴数控机床重复定位精度评定策略探讨

A Discussion on the Scheme of Evaluation for the Positioning Repeatability in Variable-Axes Numerical Control Machine Tools

机器人手端位姿误差模型及重复定位精度优化综合

The error analysis of robot arm 's position and posture and optimum distribution under the requirement of repeatable accuracy

实验表明：该机械手结构简单、工作可靠，重复定位精度可达到±0.01mm。

The experiments show that the manipulator is simple and dependable , its repeat accuracy can arrive at ± 0.01 mm .

通过采用加装原点开关和改进原点捕捉方法，有效提高了系统的重复定位精度；对于系统的周期性误差和偶然性误差，采用了一种误差前馈补偿控制方法；

Installation of an origin switch and improvement of the method of origin trapping effectively enhance repetitive positioning precision of the system .

工作成果表明，其重复定位精度、所制板图的套合精度以及图形质量均达到国内先进水平。

The results show that its repetitive positioning accuracy , overlap accuracy of masks and quality of masks have reached advanced level in China .

现今机器人厂家生产的机器人其重复定位精度比较高，而绝对定位精度却很低。

Nowadays , the repeatability accuracy of the robot produced by robot manufacturers is very high , while its absolute accuracy is very low .

对该系统的定位精度、重复定位精度进行了测试，结果为：其定位误差、重复定位误差达到2μm；

Tests have been made for this system 's position finding precision and repetition position finding precision with a result of 2 μ m error .

对前面提出的理论方面进行了实验研究，研究结果表明，本文方法又有效提高全自动视觉无铅锡膏印刷机的重复定位精度，验证了本文方法的正确性。

The experimental result shows that the repeatability positioning precision and stability of the solder paste printer was improved and verified correctness of the method .

它的精度和各项性能直接影响数控机床的定位精度和重复定位精度，特别是滚珠丝杠的导程误差对机床定位精度的影响最为明显。

The precision and performance index of ball screw unit determine the positioning accuracy and the resetting accuracy of NC machines , especially its lead error .

所采用的控制方法对视觉传感器精度和机构重复定位精度依赖性较小，利于在进一步推广中控制成本。

Moreover , a method that did not depend on high precise equipments was adopted to control the robot , so the cost was reduced greatly .

超精密气浮工件台系统是当前主流光刻机中的核心子系统，要求具有纳米级的重复定位精度和同步运动精度。

Stage system is one of the most important sub systems in a step and scanner , the accuracy of its positioning and synchronizing has reached nanometer level .

在经济型数控车床上的实验表明：该系统的定位精度和重复定位精度均控制在±10μm以内，获得预期效果。

The experimental data in an economical CNC lathe showed , the positioning accuracy and the repeatability of positioning were controlled within 10 ±μ m , which were expected .

设计二维定位系统的精度验证实验，利用激光干涉仪检验工作台的移动精度，通过图像处理、比较偏差的方式验证二维定位系统的综合定位精度和重复定位精度。

Have designed the accuracy verification experiment . Used Laser interferometer to test the moving accuracy of the worktable , and verified the total position accuracy through image processing and deviation comparison .

利用光学显微镜测定了系统重复定位精度，实验结果表明系统重复定位精度和预对准时间均达到了技术指标要求。

The repetitive positioning accuracy is measured by optical microscope . The experiment results show that the repeatability of the orientation and the average time of the pre-alignment satisfy the technical specifications .

实验结果表明，粗动台系统的最高速度为5mm/s，最低速度为3.4μm/s，系统的重复定位精度为±1μm；

Experimental results show that the maximal speed of macro platform is 5mm / s , the minimal speed is 3.4 μ m / s and the repetitive error is less than 1 μ m ;

仿真结果表明，基于自抗扰控制器的电动缸位置伺服控制系统动态响应快，没有超调，重复定位精度高，抗扰能力强。

Simulation results show that the electric cylinder position servo control system based on ADRC have the following favorable characteristics such as fast dynamic response , no overshoot , high repeatability and the ability of auto disturbance resistant .

设计步进电机的加减速算法，减小定位振动干扰，并对二维步进电机移动平台的重复定位精度进行验证；设计两种电感测头微小位移信号处理电路实现信号处理。

The acceleration or deceleration algorithm for stepper motor is designed to reduce vibration disturbance during movement and to improve the positioning accuracy of the moving platform . Two kinds of circuits for small inductive signal processing are designed . 4 .